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SEMI Standards Summary

Name A.K.A Keyword Description E4 SECS-I [RS-232] The SECS-I standard defines a low level communication protocol for interfacing a host computer to equipment through an RS-232 serial communications interface. E5 SECS-II [Data Exchange] [GEM300] The SECS-II standard provides a definition of messages and related data items exchanged between the host and the equipment. E30 GEM - Generic Model for Communication and Control of Manufacturing Equipment [GEM300] [State Machine] The GEM standard uses a specific subset of SECS-II messages to implement several state machines that define rules to govern the interaction between the equipment and the host computer.